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激光器的应用与芯片切割工艺的现况

激光器的应用与芯片切割工艺的现况

    依据其波长的变化、输出方式(连续波或者脉波输出)的不同、不同的输出功率与能量,不论是电子工业、汽车工业、飞机工业、五金加工、塑料加工、医学、通讯、军事、甚至于娱乐业都可以找到激光的应用范例, 可谓不胜枚举、洋洋大观, 难怪有人称激光器为万能工具。

    ZHUANJIUJIGUANGQIQIEGE(Laser Cutting or Laser Scribing)ERLUN,QIYUANLIXILIYONGGAONENGLIANGJIZHONGYUJIXIAOMIANJISHANGSUOCHANSHENGDEREXIAOYING(Thermal Technique), SUOYIFEICHANGSHIYONGYUQIEGEJUYOUYING(Hard)、CUI(Brittle)TEXINGDETAOCICAILIAO, YANGHUALV(Alumina)JIBANJIUSHIYIGECHANGJIANJIGUANGQIQIEGECHENGGONGDEYINGYONGANLI。 RANERJIANGJIGUANGQISHIYONGYU8”YIXIAGUIXINPIANDEQIEGEANLIBINGBUDUOJIAN, SUIRANZUOZHEYICENGYU1999 Productronica MunchenSHIDICANGUANGUORUISHISynovaGONGSISUOKAIFAYIYAGEJIGUANGQIWEIHEXINDEGUIXINPIANQIEGEJI。ZHIYUXUESHUJIEDUIYUJIGUANGQIQIEGEGUICAIZHIDEYANJIUZEZHISHAOKEYIZHUISUDAO1969NIANL. M. LumleyFABIAOYUCeramic BulletinDEWENZHANG”Controlled Separation of Brittle Materials Using a Laser”。

    JIANGJIGUANGQIQIEGEJISHIYONGYUGUIXINPIANQIEGEGONGYI, CHULEJIGUANGQIBENSHENJUDADERELIANGWENTIXUYAOKEFUZHIWAI,QISHIBULUNJIUSHOUJIA、GONGYILIANGLV、YUCHANNENGERLUN, JIGUANGQIQIEGEJIJUNWEIJIAOYIZUANSHIDAOJU(Diamond Blade)WEIJICHUDEXINPIANQIEGEJI(Wafer Saw)YOUYUE, SUOYI8”GUIXINPIANDEQIEGEGONGYIMUQIANRENGYIXINPIANQIEGEJIWEIZHULIU, BUGUOYOUYUDIANZICHANPINQINGBOHUADEQUSHIYUGUIXINPIANYANSHENZHI300 mm,  SHIDEXINPIANQIEGEJIDEDIWEISHOUDAOJIGUANGQIQIEGEJIJIDADETIAOZHAN, QINGCANKAOYIXIASHUOMING。

2. XINPIANQIEGEDEWEILAI

    YIZUANSHIDAOJULAIQIEGEXINPIANJIANGSHIDEXINPIANDEBEIMIANCHENGSHOULAYINGLI(Tension Stress), YINCI, DANGHOUDUBIANBOSHIHUIZAOCHENGGENGYANZHONGDEXINPIANBEIBENG(Back Side Chipping or Cracking), ERFlip ChipDEFENGZHUANGFANGSHIGENGJIATUXIANXINPIANBEIBENGDEPINZHIWENTI。

    SUIRANJIANGDIQIEGESUDUHUOZHECAIQUJIEDUANQIEGE(Step Cutting)DEFANGSHIDOUKEYIGAISHANXINPIANBEIBENGDEPINZHIWENTI, BUGUOERZHEJIEXUFUCHUJIANGDICHANNENGDEDAIJIA。RIBENDISCOGONGSIYANFACHUSUOWEIDBG(Dicing Before Grinding)DEGONGYILAIJIEJUECIWENTI, BUGUOCHULEDicing(QIEGE)YUGrinding(BEIMO)ZHIWAI, CIDBGGONGYISHANGBAOKUOFANFUDETape(SHANGJIAODAI)YUDe-tape(QUJIAODAI)CHENGXU,SUOYICIGOUXIANGZHIJINBINGWEIGUANGWEIYEJIEJIESHOU。

    RUGUOQIEGESHIDAOJUNENGGOUBUSHILIYUXINPIAN, WUYIDEJIANGKEBIMIANXINPIANBEIBENGDECHANSHENG, YINCIFEIJIECHU(Non Contact)DEQIEGEFANGSHI, RUJIGUANGQIHUOZHESHIKE(Etch), JIUTEBIESHOUDAOYEZHEDEZHUYIYUQIDAI。BUGUOYISHANGDELIANGZHONGTIDAI(Alternative)GONGYIYIDOUYOUQIXUYAOKEFUDEWENTI, SUOYIMUQIANYIWEIYOULIANGCHANDEXIANGGUANXINPIANQIEGEJIZHONGCHUXIAN。

    CHULEXINPIANBEIBENGDEWENTIZHIWAI, QISHILow-kCAIZHIDECHUXIANCAISHIMUQIANJIGUANGQIQIEGEJISHOUDAODAJIAZHUMUDEZHENZHENGYUANYIN。XUDUOLow-kCAIZHIYOUYUQIPorousHUOZHEPolymerDETEXING, BINGBUYIYIZUANSHIDAOJULAIQIEGE, RANERRUYICHUANTONGDEJIGUANGQIWEIZHI, YIHUIYINGAOREERCHANSHENGBULIANGDEQIEGEPINZHI。 

    ZUILIXIANGDEZHUANGKUANGJIUSHIXIWANGJIGUANGQIDENENGLIANGNENGGOUQUANBUYONGYIQUCHULow-kCAIZHI, ERBUHUICANLIUDUOYUDERELIANG, HUANJUHUASHUO, JIGUANGQIJINXUFUZEQUCHULow-kCAIZHI, ERXINPIANBENSHENZERENGYICHUANTONGDEZUANSHIDAOJULAIQIEGE, CHUFEIRIHOUXINPIANHOUDUBODAOWUFACHENGSHOUZUANSHIDAOJUDEZHUANGJIHUOZHEJIGUANGQIGUANGNENGGOUJIANGQIQINGYIDEQIECHUAN, FOUZECIZHONGHybrid(FUHE)DEFANGSHIYINGSHIBIJIAOHELIDEZUOFA。

    Low-kCAIZHIDEJIGUANGQIQIEGEJISUIRANBEIXUDUORENKANHAO, BUGUOTACHONGQILIANGZHISHIXUDUOHOUXUANSHEBEIZHONGJIAOBEIKANHAODEYIGE, ZAIZHENGSHICHENGWEIZHULIULIANGCHANSHEBEIQIAN, TASHANGYOUXUDUOWENTIXUYAOQUKEFU, LIRU: DANGQIEGEDAO(Cutting Street)YOUCESHIDIAN(Metal Pad)SHISUOZAOCHENGDEBOLIPINZHIWENTIDENGDENG, QISHI, WOMENKEYOUTAIWANMUQIANSHANGWUYITAIBEIBANDAOTIYEZHEYANZHENGCHENGGONGDELow-kCAIZHIJIGUANGQIQIEGEJIDEZHEIGESHISHILAIPANDUAN, JIUKEYIHENQINGCHUDELEJIEZHEICHANGZHANYISHANGWEIJIESHU, GUONEICHANXUEYANRUYOUBUCUODEGOUXIANG, YEBUSHIWANQUANMEIYOUZAIZHEICHANGXINDEJINGSAILIBADETOUCHOUDEJIHUI。

文章标签:激光器,激光切割机,芯片切割工艺
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